Keystone error analysis of projection optics in a maskless lithography system-Reference-Cited by-同舟云学术

Keystone error analysis of projection optics in a maskless lithography system

Published:2015-02 Issue:2 Volume:16 Page:373-378
ISSN:2234-7593
Container-title:International Journal of Precision Engineering and Manufacturing
language:en
Short-container-title:Int. J. Precis. Eng. Manuf.

Author:

Kang Dong Won,Kang Minwook,Hahn Jae Won

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,Mechanical Engineering

Link

http://link.springer.com/content/pdf/10.1007/s12541-015-0049-6.pdf

Reference20 articles.

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2. Texas Instruments, “TI DLP® Technology for Home Theater,” http://www.ti.com/lsds/ti/dlp-technology/markets/dlp-products-for-hometheater. page (Accessed 23 DEC 2014)

3. Kang, M., Kang, D. W., and Hahn, J. W., “Detecting Digital Micromirror Device Malfunctions in High-Throughput Maskless Lithography,” Journal of the Optical Society of Korea, Vol. 17, No. 6, pp. 513–517, 2013.

4. Texas Instruments, “DLP® Discovery™.95 1080p 2xLVDS 120 Type A DMD,” http://focus.ti.com/pdfs/dlpdmd/D4000_952509928. pdf (Accessed 23 DEC 2014)

5. Chan, K. F., Feng, Z., Yang, R., Ishikawa, A., and Mei, W., “High- Resolution Maskless Lithography,” Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 2, No. 4, pp. 331–339, 2003.

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