Publisher
SPIE-Intl Soc Optical Eng
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference20 articles.
1. Y. Wang and J. Bokor, “Maskless lithography with nanodroplets,” http://buffy.eecs.berkeley.edu/IRO/Summary/02abstracts/yanw.1.html.
2. Low energy electron beam top surface image processing using chemically amplified AXT resist
3. P. Ware, “Removing the mask,”OE Mag.2(3), 26–27 (Mar. 2002).
4. C. Quate, “Sub-micron lithography with the atomic force microscope,” http://www.stanford.edu/group/quate_group/Home/HomePages/Presentations/U98part1a.PDF.
5. Direct laser writing of self-developed waveguides in benzyldimethylketal-doped sol-gel hybrid glass
Cited by
88 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献