Modification of optical and mechanical surface properties of sputter-deposited aluminum thin films through ion implantation-Reference-Cited by-同舟云学术

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Modification of optical and mechanical surface properties of sputter-deposited aluminum thin films through ion implantation

Published:2014-05 Issue:5 Volume:15 Page:889-894
ISSN:2234-7593
Container-title:International Journal of Precision Engineering and Manufacturing
language:en
Short-container-title:Int. J. Precis. Eng. Manuf.

Author:

Kang Tae June,Kim Jeong-Gil,Lee Ho-Young,Lee Jae-Sang,Lee Jae-Hyung,Hahn Jun-Hee,Kim Yong Hyup

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,Mechanical Engineering

Link

http://link.springer.com/content/pdf/10.1007/s12541-014-0413-y.pdf

Reference26 articles.

1. Allen, M. G., Mehregany, M., Howe, R. T., and Senturia, S. D., “Microfabricated Structures for the In situ Measurement of Residual Stress, Young’S Modulus, and Ultimate Strain of Thin Films,” Applied Physics Letters, Vol. 51, No. 4, pp. 241–243, 1987.

2. Chason, E., Jadhav, N., Pei, F., Buchovecky, E., and Bower, A., “Growth of Whiskers from Sn Surfaces: Driving Forces and Growth Mechanisms,” Progress in Surface Science, Vol. 88, No. 2, pp. 103–131, 2013.

3. Checchetto, R., Gratton, L., and Miotello, A., “Aluminum and Iron Surface Modification by Deuterium Ion Implantation and Thermal Desorption Process,” Surface and Coatings Technology, Vol. 158, No. pp. 356–363, 2002.

4. Dearnaley, G., “Ion Beam Modification of Metals,” Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 50, No. 1, pp. 358–367, 1990.

5. Xie, H., Pan, Y., and Fedder, G. K., “A CMOS-MEMS Mirror with Curled-Hinge Comb Drives,” Microelectromechanical Systems, Journal of, Vol. 12, No. 4, pp. 450–457, 2003.

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