Micromachining of Piezoelectric MEMS-Reference-Cited by-同舟云学术

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Micromachining of Piezoelectric MEMS

Published:2001 Issue: Volume: Page:596-599
ISSN:
Container-title:Transducers ’01 Eurosensors XV
language:
Short-container-title:

Author:

Baborowski J.,Ledermann N.,Gentil S.,Muralt P.

Publisher

Springer Berlin Heidelberg

Link

http://link.springer.com/content/pdf/10.1007/978-3-642-59497-7_141

Reference12 articles.

1. Muralt, P., Ferroelectric thin films for microsensors and actuators: a review. Micromech.Microeng., 2000. 10(2): p. 136–146.

2. Murait, P., PZT thin films for micro sensors and actuators: Where do we stand? IEEE Trans. Ultrasonics, Ferroelectrics, Frequency Control (UFFC), 2000. 47: p. 903–915.

3. Miyahara, Y., et al., PZT cantilever for non-contact Atomic force microscopy. Appl.Surface Science, 1999. 140: p. 428–431.

4. Ledermann, N., et al., Piezoelectric cantilever microphone for photoacoustic gas detection. Integrated Ferroelectrics, 2001. 35: p. 177–184.

5. Dubois, M.-A. and P. Murait, Properties of AlN thin films for piezoelectric transducers and microwave filter applications. Appl.Phys.Lett., 1999. 74: p. 3032–3034.

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Piezoelectric MEMS: Materials and Devices;Piezoelectric and Acoustic Materials for Transducer Applications;2008

2. Microfabrication of Piezoelectric MEMS;Electroceramic-Based MEMS;2005

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