Piezoelectric MEMS: Materials and Devices

Author:

Bassiri-Gharb Nazanin

Publisher

Springer US

Reference66 articles.

1. Aigner, R., in MEMS in RF-filter applications: Thin film bulk-acoustic-wave technology, Seoul, South Korea, 2005 (Institute of Electrical and Electronics Engineers Computer Society, Piscataway, NJ 08855-1331, United States), 5.

2. Baborowski, J. (2004) Microfabrication of piezoelectric MEMS. J. Electroceram. 12: 33

3. Baborowski, J., Muralt, P., Ledermann, N. (2000), Mechanisms of Pb(Zr0.53 Ti0.47 )O3 thin film etching with ECR/RF reactor, 577.

4. Baborowski, J., Ledermann, N., Gentil, S., in Micromachining of piezoelectric MEMS, Munich, Germany, 2001 (Springer-Verlag), 596

5. Bassiri-Gharb, N., Fuji, I., Hong, E. (2007) Domain Wall Contributions to the Properties of Piezo-electric Thin Films, J. Electroceram.

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