Piezoelectric cantilever microphone for photoacoustic gas detector
Author:
Affiliation:
1. a Ceramics Laboratory, Swiss Federal Institute of Technology , CH-1015, Lausanne, Switzerland
2. b Siemens Building Technologies AG Cerberus Division , Ch-8708 Männedorf, Switzerland
Publisher
Informa UK Limited
Subject
Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Ceramics and Composites,Control and Systems Engineering,Electronic, Optical and Magnetic Materials
Link
https://www.tandfonline.com/doi/pdf/10.1080/10584580108016899
Reference7 articles.
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2. Weber , M. D. 2000. Switzerland: EPFL. Thesis n° 2075
3. Fabrication and characterization of micromachined accelerometers based on PZT thin films
4. Piezoelectric cantilever microphone and microspeaker
5. Self-excited piezoelectric PZT microcantilevers for dynamic SFM—with inherent sensing and actuating capabilities
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