Self-excited piezoelectric PZT microcantilevers for dynamic SFM—with inherent sensing and actuating capabilities-Reference-Cited by-同舟云学术

Self-excited piezoelectric PZT microcantilevers for dynamic SFM—with inherent sensing and actuating capabilities

Published:1999-01 Issue:2 Volume:72 Page:179-188
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Lee Chengkuo,Itoh Toshihiro,Suga Tadatomo

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference40 articles.

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5. H.K. Wickramasinghe, Scanned-probe microscopes, Sci. Am. Oct. (1989) 74–81.

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