Porous Organosilicates for On-Chip Applications: Dielectric Generational Extendibility by the Introduction of Porosity-Reference-Cited by-同舟云学术

Porous Organosilicates for On-Chip Applications: Dielectric Generational Extendibility by the Introduction of Porosity

Published:2003 Issue: Volume: Page:167-202
ISSN:1437-0387
Container-title:Springer Series in Advanced Microelectronics
language:
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Author:

Volksen W.,Hawker C. J.,Hedrick J. L.,Lee V.,Magbitang T.,Toney M.,Miller R. D.,Huang E.,Liu J.,Lynn K. G.,Petkov M.,Rodbell K.,Weber M. H.

Publisher

Springer Berlin Heidelberg

Link

http://link.springer.com/content/pdf/10.1007/978-3-642-55908-2_6.pdf

Reference114 articles.

1. S.R. Wilson, C.J. Tracy, J.L. Freeman Jr.: inHandbook of Multilevel Metallization of Integrated Circuitsed. by S.R. Wilson, C.J. Tracy, J.L. Freeman Jr. (Noyes Publications, Park Ridge, NJ 1993) Chap. 1

2. D. Edelstein, J. Heidenreich, R. Goldblatt, W. Cote, C. Uzoh, N. Lustig, P. Roper, T. McDevitt, W. Motsiff, A. Simon, J. Durkovic, R. Wachnik, H. Rathore, R. Schultz, L. Su, S. Luce, J. Slattery: Tech. Digest IEEE Int. Electron Devices Meeting, 376 (1997)

3. R.D. Miller: Science 286, 421 (1999) and supplementary material

4. C.T. Rosenmayer, W. Bartz, J. Hammes: Proc. Mater. Res. Soc. 476, 231 (1997)

5. P.M. Korinek: Macromolecular Symp. 82, 61 (1994)

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