Influence of Substrate Temperature, Pressure and Grit Size on Synthesis of SiC Thin Film by Pulsed Laser Deposition Technique
Author:
Publisher
Springer Berlin Heidelberg
Link
http://link.springer.com/content/pdf/10.1007/978-3-642-35197-6_42.pdf
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4. Banerjee, C., Narayanan, K.L., Haga, K., Sritharathikhun, J., Miyajima, S., Yamada, A., Kongai, M.: Fabrication of microcrystalline cubic silicon carbide / crystalline silicon heterojunction solar cell by hot wire chemical vapour deposition. Japanese Journal of Applied Physics 46, 1–6 (2007)
5. Negoro, Y., Kimoto, T., Matsunami, H.: Stability of deep centers in 4H-SiC epitaxial layers during thermal annealing. Applied Physics Letters 85, 1716–1718 (2004)
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