Spectroscopic Ellipsometry of Nanoscale Materials for Semiconductor Device Applications
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Publisher
Springer Berlin Heidelberg
Link
http://link.springer.com/content/pdf/10.1007/978-3-642-33956-1_16
Reference61 articles.
1. G.D. Hutcheson, The first nanochips. Sci. Am. 290(4), 48–55 (2004)
2. V.K. Kamineni, J. Hilfiker, J. Freeouf, J. Fielden, S. Consiglio, R. Clark, G.J. Leusink, A.C. Diebold, Extension of Far UV spectroscopic ellipsometry studies of high- $$\kappa $$ κ dielectric films to 130 nm. Thin Solid Films 519, 2894 (2011)
3. M. Di, E. Bersch, S. Consiglio, R. Clark, T. Zhang, P. Tyagi, G. Leusink, T. Kaack, A.C. Diebold, Spectroscopic ellipsometry characterization of high- $$\kappa $$ κ metal gate stacks with V $$_{t}$$ t shift layers. Thin Solid Films 519, 2889 (2011)
4. P. Leray, G.F. Lorusso, S. Cheng, N. Collaert, M. Jurczak, S. Shirke, Accurate and reliable optical CD of MuGFET down to 10 nm, metrology, inspection, and process control for microlithography XXI, in Proceedings of SPIE, 2007 ed. by C.N. Archie, vol. 6518, p. 65183B
5. K.S. Novoselov, A.K. Geim, S.V. Morozov, D. Jiang, Y. Zhang, S.V. Dubonos, I.V. Grigorieva, A.A. Firsov, Electric field effect in atomically thin carbon films. Science 306(5695), 666 (2004)
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