Chemical vapor deposition of SiC at different molar ratios of hydrogen to methyltrichlorosilane
Author:
Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering,Mechanics of Materials,General Materials Science
Link
http://link.springer.com/content/pdf/10.1007/s11771-009-0121-4.pdf
Reference19 articles.
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2. BESMANN T M, SHELDON B W, LOWDEN R A, STINTON D P. Vapor-phase fabrication and properties of continuous-filament ceramic composites [J]. Science, 1991, 253: 1104–1109.
3. SOTIRCHOS S V, PAPASOULIOTIS G D. Experimental study of the atmospheric pressure chemical vapor deposition of silicon carbide from methyltrichlorosilane [J]. J Mater Res, 1999, 14: 3397–3409.
4. LOUMAGNE F, LANGLAIS F, NASLAIN R. Reactional mechanisms of the chemical vapour deposition of SiC-based ceramics from CH3SiCl3/H2 gas precursor [J]. J Cryst Growth, 1995, 155: 205–213.
5. LOUMAGNE F, LANGLAIS F, NASLAIN R. Experimental kinetic study of the chemical vapour deposition of SiC-based ceramics from CH3SiCl3/H2 gas precursor [J]. J Cryst Growth, 1995, 155: 198–204.
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