Publisher
Springer Science and Business Media LLC
Subject
Condensed Matter Physics,General Materials Science,Modelling and Simulation,General Chemistry,Atomic and Molecular Physics, and Optics,Bioengineering
Reference71 articles.
1. Altavilla C, Ciliberto E (2011) Inorganic nanoparticles: synthesis, applications, and perspectives. Nanomaterials and their applications. CRC Press, Boca Raton
2. AMO GmbH (2015) AMONIL & AMOPRIME—low viscosity imprint resist and adhesion promoter: data sheet.
http://www.amo.de/wp-content/uploads/2015/03/FactSheet_AMONIL.pdf
. Accessed 12 October
3. Austin MD, Ge H, Wu W, Li M, Yu Z, Wasserman D, Lyon SA, Chou SY (2004) Fabrication of 5 nm linewidth and 14 nm pitch features by nanoimprint lithography. Appl Phys Lett 84(26):5299–5301. doi:
10.1063/1.1766071
4. Banu S, Birtwell S, Galitonov G, Chen Y, Zheludev N, Morgan H (2007) Fabrication of diffraction-encoded micro-particles using nano-imprint lithography. J Micromech Microeng 17(7):S116–S121. doi:
10.1088/0960-1317/17/7/S08
5. Buyukserin F, Aryal M, Gao J, Hu W (2009) Fabrication of polymeric nanorods using bilayer nanoimprint lithography. Small 5(14):1632–1636. doi:
10.1002/smll.200801822
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