Funder
Council of Scientific and Industrial Research
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials
Cited by
2 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Air Damping Effects on Perforated RF MEMS Switches;2022 3rd International Conference on Electronics and Sustainable Communication Systems (ICESC);2022-08-17
2. AZ4620 Photoresist as an Alternative Sacrificial Layer for Surface Micromachining;Journal of Electronic Materials;2020-09-14