Fabrication and analysis of radiofrequency MEMS series capacitive single-pole double-throw switch-Reference-Cited by-同舟云学术

Fabrication and analysis of radiofrequency MEMS series capacitive single-pole double-throw switch

Published:2016-10-06 Issue:4 Volume:15 Page:045001
ISSN:1932-5150
Container-title:Journal of Micro/Nanolithography, MEMS, and MOEMS
language:en
Short-container-title:J. Micro/Nanolith. MEMS MOEMS

Author:

Bansal Deepak¹,Bajpai Anuroop²,Prem Kumar ²,Kaur Maninder²,Rangra Kamaljit¹

Affiliation:

1. Council of Scientific and Industrial Research-Central Electronics Engineering Research Institute, Pilani, Rajasthan 333031, IndiabAcademy of Scientific and Innovative Research, Council of Scientific and Industrial Research Campus, CSIR Road, Taramani, Chennai 600113, India

2. Council of Scientific and Industrial Research-Central Electronics Engineering Research Institute, Pilani, Rajasthan 333031, India

Publisher

SPIE-Intl Soc Optical Eng

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference21 articles.

1. RF MEMS switches and switch circuits

2. Design of novel compact anti-stiction and low insertion loss RF MEMS switch

3. Design of compact and wide bandwidth SPDT with anti-stiction torsional RF MEMS series capacitive switch

4. COMPARISON OF PACKAGING TECHNOLOGIES FOR RF MEMS SWITCH

5. Design and fabrication of a reduced stiction radio frequency MEMS switch

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