Design and fabrication of a reduced stiction radio frequency MEMS switch-Reference-Cited by-同舟云学术

Design and fabrication of a reduced stiction radio frequency MEMS switch

Published:2015-09-03 Issue:3 Volume:14 Page:035002
ISSN:1932-5150
Container-title:Journal of Micro/Nanolithography, MEMS, and MOEMS
language:en
Short-container-title:J. Micro/Nanolith. MEMS MOEMS

Author:

Bansal Deepak¹,Bajpai Anuroop²,Kumar Prem²,Kumar Amit¹,Kaur Maninder²,Rangra Kamaljit¹

Affiliation:

1. Sensors and Nanotechnology Group, CSIR–Central Electronics Engineering Research Institute (CEERI), Pilani, Rajasthan 333031, IndiabAcademy of Scientific and Innovative Research (AcSIR), Taramani, Chennai 600 113, India

2. Sensors and Nanotechnology Group, CSIR–Central Electronics Engineering Research Institute (CEERI), Pilani, Rajasthan 333031, India

Publisher

SPIE-Intl Soc Optical Eng

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference23 articles.

1. RF MEMS switches and switch circuits

2. RF MEMS Metal-Contact Switches With mN-Contact and Restoring Forces and Low Process Sensitivity

3. Estimation of Stiction Force From Electrical and Optical Measurements on Cantilever Beams

4. Effect of residual stress on RF MEMS switch

5. Experimental characterization of stiction due to charging in RF MEMS;van Spengen,2002

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