Air Damping Effects on Perforated RF MEMS Switches
Author:
Affiliation:
1. Saveetha Engineering College,Department of ECE,Chennai,India
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/9885261/9885247/09885366.pdf?arnumber=9885366
Reference18 articles.
1. Modified Reynolds equation and analytical analysis of squeeze-film air damping of perforated structures
2. Squeeze-film damping in solid-state accelerometers;starr;Micromechanics and MEMS Classic and Seminal Papers to 1990,1997
3. Equivalent-circuit model of the squeezed gas film in a silicon accelerometer
4. A Hybrid RF MEMS Switch Actuated by the Combination of Bidirectional Thermal Actuations and Electrostatic Holding
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