1. Semiconductor Industry Association, International Technology Roadmap for Semiconductors (Austin, TX: ITRS 2003), http://public.itrs.net.
2. A. Braun, Semiconductor Int. 5, 52 (2003).
3. S. Cummings, M. Mills, J. Waeterloos, and D. Scheck, IMAPS Proc. Packaging Copper/Low-K Semiconductors 12, 35 (2003).
4. D.T. Price, R.J. Gutman, and S.P. Murarka, Thin Solid Films 308, 523 (1997).
5. R.J. Gutman, T.P. Chow, S. Lakshminarayama, D.T. Price, J.M. Steigerwald, L. You, and S.P. Murarka, Thin Solid Films 270, 472 (1995).