Author:
Gutmann Ronald J.,Chow T.Paul,Lakshminarayanan S.,Price David T.,Steigerwald Joseph M.,You Lu,Murarka Shyam P.
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
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4. Proc. 1993 IEDM;Cho,1993
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