Optical transmission losses in polycrystalline silicon strip waveguides: Effects of waveguide dimensions, thermal treatment, hydrogen passivation, and wavelength-Reference-Cited by-同舟云学术

Optical transmission losses in polycrystalline silicon strip waveguides: Effects of waveguide dimensions, thermal treatment, hydrogen passivation, and wavelength

Published:2000-12 Issue:12 Volume:29 Page:1380-1386
ISSN:0361-5235
Container-title:Journal of Electronic Materials
language:en
Short-container-title:Journal of Elec Materi

Author:

Liao Ling,Lim Desmond R.,Agarwal Anuradha M.,Duan Xiaoman,Lee Kevin K.,Kimerling Lionel C.

Publisher

Springer Science and Business Media LLC

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://link.springer.com/content/pdf/10.1007/s11664-000-0122-4.pdf

Reference11 articles.

1. J.S. Foresi, M.R. Black, A.M. Agarwal, and L.C. Kimerling, Appl. Phys. Lett. 68, 2052 (1996).

2. L.C. Kimerling, D.M. Koker, B. Zheng, F.Y. Ren, and J. Michel, Erbium-Doped Silicon for Integrated Optical Interconnects in Semiconductor Silicon, ed. H.R. Huff, W. Bergholz, and K. Sumino (Pennington, NJ: The Electrochem. Soc., 1994), p. 486.

3. D.R. Lim, “Silicon Electro-Optic Modulator Based on Waveguide Coupling at 1=1.55 mm” (Bachelors thesis, MIT, 1994).

4. N. Yamauchi and R. Reif, J. Appl. Phys. 75, 3235 (1994).

5. D. Tsoukalas and D. Kouvatsos. Appl. Phys. Lett. 68, 1549 (1996).

Cited by 83 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Optimizations of Double Titanium Nitride Thermo-Optic Phase-Shifter Heaters Using SOI Technology;Sensors;2023-10-19

2. The impact of loss on high-Q resonant metasurfaces: A case study for heated a-Si:H;Journal of Quantitative Spectroscopy and Radiative Transfer;2022-12

3. Polycrystalline silicon PhC cavities for CMOS on-chip integration;Scientific Reports;2022-10-12

4. Laser Thermal Processing of Group IV Semiconductors for Integrated Photonic Systems;Advanced Photonics Research;2021-05-20

5. The role of adiabatic and non-adiabatic phenomena in passing waves from a semi-bounded loss-free waveguide to semi-bounded plasma waveguide;Indian Journal of Physics;2021-04-08