Author:
Song Ohsung,Yoon Kijeong,Kim Sangyeob
Publisher
Springer Science and Business Media LLC
Subject
Materials Chemistry,Metals and Alloys,Mechanics of Materials,Condensed Matter Physics
Reference15 articles.
1. R. Lindsay, A. Lauwers, M. de Potter, N. Roelandts, C. Vrancken, and K. Maex, Microelectron. Eng. 55, 157 (2001).
2. International Technology Road Map for Semiconductors, 2003 ed., p. 25, Front End Process, SIA (2003).
3. E. G. Colgan, J. P. Gambino, and Q. Z. Hong, Mater. Sci. Eng. 16, 43 (1996).
4. J. Prokop, C. E. Zybill, and S. Veprek, Thin Solid Films 359, 39 (2000).
5. C. Detavernier, R. L. Van Meirhaeghe, and F. Cardon, J. Appl. Phys. 88, 133 (2000).
Cited by
2 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献