Review on Micromachining Techniques

Author:

Gentili E.,Tabaglio L.,Aggogeri F.

Publisher

Springer Vienna

Reference28 articles.

1. Lang W., (1996), Silicon microstructuring technology, Materials Science and Engineering, R I7, 1–55.

2. Mehregany M., Dewa A.S., (1993), MCNC Short Course Handbook, Case Western Reserve University, Cleveland, OH, http://mems.cwru.edu/shortcourse/

3. Mems beginner’s guide, www.memsnet.org

4. Ehrfeld W., Lehr H., (1995), Deep x-ray lithography for the production of three-dimensional microstructures from metals, polymers and ceramics, Radiat. Phys. Chem. 45(3) 349–365.

5. Malek C.K., Saile V., (2004), Applications of LIGA technology to precision manufacturing of high-aspect-ratio micro-components and systems: a review, Microelectronics Journal 35, 131–143.

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