Synthesis of Buried Dielectric Layers in Silicon by Ion Implantation
Reference88 articles.
1. I.H. Wilson, Nucl. Instrum. and Meth. B1:331 (1984).
2. M. Wantanabe and A. Tool, Japan, J. Appl. Phys. 5:737 (1966).
3. P.V. Pavlov, E.I. Zorin, D.I. Telel’baum and Yu.S. Popov, Soviet Phys. Doklady 10:786 (1966).
4. P.V. Pavlov, T.A. Kruze, D.I. Telel’baum, E.I. Zorin, E.W. Shitova and N.V. Godkova, Phys. Stat. Solidi A36:81 (1976).
5. F. Cianfrone, U. Fasoli and P. Mazzoldi, Nuovo Cimento B57:534 (1968).