1. J.H.Freeman: Proc. European Conf. Ion Impl., Reading, (Peter peregrinus England 1970), pp. 1–18
2. For example, G.Dearnaley, J.H.Freeman, R.S.Nelson, J.Stephan:Ion Implantation (North-Holland, Amsterdam, and London 1973), pp. 448–492
3. J.H.Freeman:Ion Implantation in Semiconductors, ed. by S.Namba (Plenum Press, New York 1975) pp. 555–569)
4. M.Tamura, K.Yagi, N.Sakudo, K.Tokiguchi, T.Tokuyama: Proc. of the 9th Conf. on Solid State Devices (Japan Society of Applied Physics, Tokyo 1977) pp. 193–200
5. P.D.Parry: J. Vac. Sci. Technol.15, 111–115 (1978)