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The chemical polishing of semiconductors

Published:1975-02 Issue:2 Volume:10 Page:321-339
ISSN:0022-2461
Container-title:Journal of Materials Science
language:en
Short-container-title:J Mater Sci

Author:

Tuck Brian

Publisher

Springer Science and Business Media LLC

Subject

Mechanical Engineering,Mechanics of Materials,General Materials Science

Link

http://link.springer.com/content/pdf/10.1007/BF00540357.pdf

Reference102 articles.

1. U. R. Evans, ?The corrosion and oxidation of metals? (Edward Arnold, London, 1960) p. 962.

2. D. R. Turner, J. Electrochem. Soc. 107 (1960) 810.

3. H. C. Gatos and M. C. Lavine, in ?Progress in semiconductors?, Vol. 9, edited by A. F. Gibson and R. E. Burgess (Heywood, London, 1965) p. 1.

4. R. W. Haisty, J. Electochem. Soc. 108 (1961) 790.

5. J. H. Braun, ibid 108 (1961) 588.

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