Publisher
The Electrochemical Society
Subject
Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials
Cited by
7 articles.
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1. The mechanism of Si etching in fluoride solutions;Physical Chemistry Chemical Physics;2003-02-13
2. Nonresist Processes;Semiconductor Lithography;1988
3. Factors Influencing the Reactivity of Solids;Treatise on Solid State Chemistry;1976
4. The chemical polishing of semiconductors;Journal of Materials Science;1975-02
5. PHOTOANODIC ENGRAVING OF HOLOGRAMS ON SILICON;Applied Physics Letters;1970-09