Author:
Berthold A.,Sarro P. M.,Vellekoop M. J.
Reference11 articles.
1. W.P. Mason, Measurement of the viscosity and shear elasticity of liquids by means of a torsionally vibrating crystal, Proc. A.S.M.E., 1947, 359–370
2. J.W. Grate, S.J. Martin, R.M. White, Acoustic wave Microsensors Pt. I, Anal. Chem. 65(21), 1993, 940–948
3. J.W. Grate, S.J. Martin, R.M. White, Acoustic wave Microsensors Pt. II, Anal. Chem. 65(22), 1993, 987–996
4. M.J. Vellekoop, G.W. Lubking, P.M. Sarro, A. Venema, Evaluation of liquid properties using a silicon Lamb wave sensor system, Sensors and Actuators A43, 1994, 175–180
5. D.R. Evans, M.F. Lewis, E. Patterson, Sputtered ZnO surface wave transducers, Electron. Lett. 7(18), 1971, 557–558
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