Evaluation of liquid properties using a silicon lamb wave sensor

Author:

Vellekoop M.J.,Lubking G.W.,Sarro P.M.,Venema A.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference18 articles.

1. Plate-mode ultrasonic oscillator sensors;White;IEEE Trans. Ultrason. Ferroelectr. Freq. Control, UFFC-34,1987

2. All-silicon plate wave oscillator for sensors;Vellekoop;Sensors and Actuators A,1991

3. Viscosity and density sensing with plate waves;Martin;Sensors and Actuators,1990

4. B.J. Costello, B.A. Martin and R.M. White, Ultrasonic plate waves for biochemical measurements, Proc. Ultrasonics Symp., Montreal, Canada, 1989, pp. 977-981

5. M.J. Vellekoop, G.W. Lubking, P.M. Sarro and A. Venema, A multi-purpose smart acoustic Lamb wave sensor system, Proc. Transducers '93, Yokohama, Japan, 1993, pp. 1052-1055

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