Proposal of Hypereutectic Al–Si-Based Multilayer Mirrors for Wavelength Between 20 nm and 25 nm
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Publisher
Springer International Publishing
Link
http://link.springer.com/content/pdf/10.1007/978-3-319-73025-7_44
Reference12 articles.
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3. Zuppella, P.: Iridium/silicon multilayers for extreme ultraviolet applications in the 20–35 nm wavelength range. Opt. Lett. 36, 1203–1205 (2011)
4. Windt, D.L.: Performance, structure, and stability of SiC/Al multilayer films for extreme ultraviolet applications. Appl. Opt. 48, 4932–4941 (2009)
5. Meltchakov, E.: Development of Al-based multilayer optics for EUV. Appl. Phys. A 98, 111–117 (2010)
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