Development of Al-based multilayer optics for EUV-Reference-Cited by-同舟云学术

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Development of Al-based multilayer optics for EUV

Published:2009-10-15 Issue:1 Volume:98 Page:111-117
ISSN:0947-8396
Container-title:Applied Physics A
language:en
Short-container-title:Appl. Phys. A

Author:

Meltchakov E.,Hecquet C.,Roulliay M.,Rossi S.,Menesguen Y.,Jérome A.,Bridou F.,Varniere F.,Ravet-Krill M.-F.,Delmotte F.

Publisher

Springer Science and Business Media LLC

Subject

General Materials Science,General Chemistry

Link

http://link.springer.com/content/pdf/10.1007/s00339-009-5445-2.pdf

Reference38 articles.

1. E. Spiller, Soft X-Ray Optics (SPIE, Bellingham, 1994)

2. A.M. Hawryluk, N.M. Seglio, D.G. Stearns, J. Vac. Sci. Technol. B 6, 2153 (1988)

3. J.-P. Chauvineau, J.-P. Marioge, M. Mullot, A. Raynal, G. Tissot, L. Valiergue, Proc. SPIE 1546, 576 (1992)

4. M.-F. Ravet, F. Bridou, X. Zhang-Song, A. Jerome, F. Delmotte, R. Mercier, M. Bougnet, P. Bouyries, J.-P. Delaboudiniere, Proc. SPIE 5250, 99 (2003)

5. J.M. Slaughter, B.S. Medower, R.N. Watts, C. Tarrio, T.B. Lucatorto, C.M. Falco, Opt. Lett. 19, 1786 (1994)

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