Study of normal incidence of three-component multilayer mirrors in the range 20–40 nm
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Publisher
The Optical Society
Reference11 articles.
1. Maximum reflectance of multilayer dielectric mirrors in the presence of slight absorption
2. Design of multilayer extreme-ultraviolet mirrors for enhanced reflectivity
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5. Reflectance enhancement in the extreme ultraviolet and soft x rays by means of multilayers with more than two materials
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