Publisher
Springer Science and Business Media LLC
Subject
Metals and Alloys,Mechanics of Materials,Condensed Matter Physics
Reference33 articles.
1. C. Schwebel, F. Mayer, G. Gautherin, and C. Pellet: J. Vac. Sci. Technol., 1986, vol. B4, pp. 1115–22.
2. F. Meyer, C. Schwebel, C. Pellet, G. Gautherin, A. Buxbaum, M. Eizenberg, and A. Raizman: Thin Solid Films, 1990, vol. 184, pp. 117–23.
3. T. Ohmi, T. Ichikawa, T. Shibata, K. Matsudo, and H. Iwabuchi: Appl. Phys. Lett., 1988, vol. 53, pp. 45–48.
4. S.M. Sze: VLSI Technology, McGraw-Hill, Columbus, OH, 1983, pp. 8–24.
5. M.L. Lee, E.A. Fitzgerald, M.T. Bulsara, M.T. Currie, and A. Lochtefeld: J. Appl. Phys., 2005, vol. 97, pp. 01111101–0111104.