Publisher
Springer Berlin Heidelberg
Reference129 articles.
1. R. Böngeler, U. Golla, M. Kässens, L. Reimer, B. Schindler, R. Senkel, M. Spranck: Electron-specimen interactions in LVSEM. Scanning 15, 1 (1993)
2. M. Lange. L. Reimer, C. Tollkamp: Testing of detector strategies in SEM by isodensities. J.Microsc. 134, 1 (1984)
3. D.K. Hindermann, R.H. Davis: SEM techniques for the examination of blind and through holes. SEM 1974 ( ITTRI, Chicago 1974 ) p. 183
4. A.E. Lukianov, G.V. Spivak, E.I. Rau, D.D. Gorodsky: The secondary electron SEM-collector with magnetic field. In Electron Microscopy
1972 ( IoP, London 1972 ) p. 186
5. K. Saito, M. Yoshizawa, K. Wada: A SEM for trench observation. J. Vac. Sci. Techn. B 8, 1152 (1990)
Cited by
3 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献