A survey of problems, solution techniques, and future challenges in scheduling semiconductor manufacturing operations

Author:

Mönch Lars,Fowler John W.,Dauzère-Pérès Stéphane,Mason Scott J.,Rose Oliver

Publisher

Springer Science and Business Media LLC

Subject

Artificial Intelligence,Management Science and Operations Research,General Engineering,Software

Reference120 articles.

1. Adams, J., Balas, E., & Zawack, D. (1988). The shifting bottleneck procedure for job shop scheduling. Management Science, 34, 391–401.

2. Agrawal, G. K., & Heragu, S. S. (2006). A survey of automated material handling systems in 300-mm semiconductor fabs. IEEE Transactions on Semiconductor Manufacturing, 19(1), 112–120.

3. Akcali, E., & Uzsoy, R. (2000). A sequential solution methodology for capacity allocation and lot scheduling problems for photolithography. In IEEE/CPMT international electronics manufacturing technology symposium (pp. 374–381).

4. Akcali, E., Nemoto, K., & Uzsoy, R. (2001). Cycle-time improvements for photolithography process in semiconductor manufacturing. IEEE Transactions on Semiconductor Manufacturing, 14(1), 48–56.

5. Almeder, C., & Mönch, L. (2009). Variable neighbourhood search for parallel batch machine scheduling. In Proceedings of VIII metaheuristic international conference (MIC).

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