Author:
Zielinski E. M.,Vinci R. P.,Bravman J. C.
Publisher
Springer Science and Business Media LLC
Subject
Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference30 articles.
1. P.-L. Pai and C.H. Ting,VMIC Conf. Proc. 6, 258 (1989).
2. J. Tao, N.W. Cheung and C. Hu,IEEE Electron. Dev. Lett. 14, 249 (1993).
3. K.P. Rodbell, E.G. Colgan and C.-K. Hu,Mat. Res. Soc. Symp. Proc. 337 (1994).
4. L. Stolt, A. Charai, F.M. D’Heurle, P.M. Fryer and J.M.E. Harper,J. Vac. Sci. Tech. A 9, 1501 (1991).
5. K. Holloway and P.M. Fryer,Appl. Phys. Lett. 57, 1736 (1990).
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