AES and SIMS profiling of buried silicide layers formed by 6 MeV high dose nickel implantation into silicon-Reference-Cited by-同舟云学术

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AES and SIMS profiling of buried silicide layers formed by 6 MeV high dose nickel implantation into silicon

Published:1989-01 Issue:4-5 Volume:333 Page:511-515
ISSN:0016-1152
Container-title:Fresenius' Zeitschrift für analytische Chemie
language:en
Short-container-title:Z. Anal. Chem.

Author:

Schönborn A.,Lindner J. K. N.,te Kaat E. H.,Hubert H.,Grasserbauer M.,Friedbacher G.

Publisher

Springer Science and Business Media LLC

Subject

Clinical Biochemistry,General Materials Science,General Medicine,Analytical Chemistry

Link

http://link.springer.com/content/pdf/10.1007/BF00572365.pdf

Reference14 articles.

1. White AE, Short KT, Dynes RC, Garno JP, Gibson JM (1987) Appl Phys Lett 50:95

2. White AE, Short KT, Dynes RC, Gibson JM, Hull R (1987) Presented at the MRS Fall Meeting Boston 1987, to appear in Mater Res Soc Symp Proc 100 and 107

3. Campisi GJ, Dietrich HB, Delfino M, Sadana DK (1986) Mater Res Soc Proc 54:747

4. Sanchez FH, Namavar F, Budnick JI, Fasihudin A, Hayden HC (1986) Mater Res Soc Symp Proc 51:439

5. Petukhov VYu, Khaibullin IB, Zaripov MM (1986) Phys Chem Mech Surf 4:522

Cited by 6 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Recording a line profile across ion-implanted conductor paths in Si wafers by a synchrotron beam microprobe;X-Ray Spectrometry;2002-09

2. MeV metal ion implantations for buried layer fabrication in silicon;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1994-02

3. Investigation of chromium, cobalt, and nickel-implantation in silicon using Auger electron spectrometry, secondary ion mass spectrometry, Rutherford backscattering spectrometry, and Monte Carlo simulation;Analytical Chemistry;1991-08-01

4. Ion beam synthesis of deep buried NiSi2 layers in silicon by 6 MeV Ni implantation;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1991-07

5. Atomic Spectrometry Update—Inorganic Mass Spectrometry and X-Ray Fluorescence Spectrometry;J. Anal. At. Spectrom.;1990

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