Spectroscopic investigation of the discharge for PA-CVD of TiN

Author:

Rie K. -T.,Gebauer A.,W�hle J.

Publisher

Springer Science and Business Media LLC

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,General Chemical Engineering,General Chemistry

Reference8 articles.

1. P. Hedenquist, M. Olsson, P. Wall�n, A. Kassman, S. Hogmark, and S. Jacobson,Surf. Coal. Technol. 41, 243 (1990).

2. Li Shizhi, Huang Wu, Yang Hongshun, and Wang Zhongshu,Plasma Chem. Plasma Process. 4, 147 (1984).

3. K.-T. Rie, S. Eisenberg, U. K�nig, H. van den Berg, and R. Tabersky, Proc. Euro-CVD, Jerusalem, Israel, 1987, R. Porat, ed., Iscar Ltd., Nahariya, Israel (1987).

4. K.-T. Rie, and A. Gebauer,Proc. 1st Int. Conf. on Plasma Surface Engineering, Garmisch-Partenkirchen, FRG, September 19?23, 1988, E. Broszeit, W. D. M�nz, H. Oechsner, K.-T. Rie, and G. K. Wolf, DGM Informationsgesellschaft, Oberursel (1989).

5. B. Kulakowska, W. Zyrnicki, and N. Badowski,Proc. 1st Int. Conf. on Plasma Surface Engineering, Garmisch-Partenkirchen, FRG, September 19?23, 1988, E. Broszeit, W. D. M�nz, H. Oechsner, K.-T. Rie, and G. K. Wolf, DGM Informationsgesellschaft, Oberursel (1989).

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