Effect of metal coating and residual stress on the resonant frequency of MEMS resonators

Author:

Pandey Ashok Kumar,Venkatesh K. P.,Pratap Rudra

Publisher

Springer Science and Business Media LLC

Subject

Multidisciplinary

Reference13 articles.

1. Bellout H, Neustupa J, Penel P 1999 Elastic properties and vibration of micro-machined structures subject to residual stresses. Proc. IEEE Canadian Conference on Electrical and Computer Engineering, 1674–1679

2. Chiou J C and Lin Y J 2005 A novel large displacement electrostatic actuator: Prestress comb drive actuator. J. Micromech. Microeng. 15: 1641–1648

3. Craighead H G 2000 Nanoelectromechanical systems. Science 290(5496): pp. 1532–1535

4. Fedder G K 1994 Simulation of microelectomechanical systems. Ph.D thesis, University of California.

5. Madou M 1997 Fundamentals of microfabrication, (Florida: CRC Press).

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