Publisher
Springer International Publishing
Reference44 articles.
1. S.H. Kim, D.B. Asay, M.T. Dugger, Nanotribology and MEMS. Nanotoday 2(5), 22–29 (2007)
2. S. Jiguet, M. Judelewicz, S. Mischler, A. Bertch, P. Renaud, Effect of filler behavior on nanocomposite SU8 photoresist for moving micro-parts. Microelectron. Eng. 83(4–9), 1273–1276 (2006)
3. P. Saravanan, Tribology of Self Lubricated SU-8 Composite for Mirco-Electro Mechanical Systems (MEMS) Applications, Ph.D. Thesis, NUS Singapore, 2015
4. J.B. Lee, K.H. Choi, K. Yoo, Innovative SU-8 lithography techniques and their applications. Micromachines 6(1), 1–18 (2015)
5. R. Martinez-Duarte, SU-8 photolithography as a toolbox for carbon MEMS. Micromachines 5(3), 766–782 (2014)
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