SU-8 Photolithography as a Toolbox for Carbon MEMS
Author:
Publisher
MDPI AG
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Control and Systems Engineering
Link
http://www.mdpi.com/2072-666X/5/3/766/pdf
Reference75 articles.
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4. Recommended terminology for the description of carbon as a solid (IUPAC Recommendations 1995)
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