Reliability of MEMS Accelerometers Embedded in Smart Mobile Devices for Robotics Applications
Author:
Publisher
Springer International Publishing
Link
https://link.springer.com/content/pdf/10.1007/978-3-031-27099-4_7
Reference22 articles.
1. Tsuchiya, T., Hemmi, T., Suzuki, J., Hirai, Y., Tabata, O.: Tensile strength of silicon nanowires batch-fabricated into electrostatic MEMS testing device. Appl. Sci. 8(6), 880–891 (2018)
2. Hafner, J., Teuschel, M., Schrattenholzer, J., Schneider, M., Schmid, U.: Optimized batch process for organic MEMS devices. Proceedings 2(904), 1–4 (2018)
3. Zhou, G., Lim, Z.H., Qi, Y., Chau, F.S., Zhou, G.: MEMS gratings and their applications. Int. J. Optomechatronics 15(1), 61–86 (2021)
4. Gad-el-Hak, M.: The MEMS Handbook, 2nd edn. CRC Press, Florida (2002)
5. Ejeian, F., et al.: Design and applications of MEMS flow sensors: a review. Sens. Actuators, A 295, 483–502 (2019)
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