Structural and electrical characterization of PZT on gold for micromachined piezoelectric membranes-Reference-Cited by-同舟云学术

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Structural and electrical characterization of PZT on gold for micromachined piezoelectric membranes

Published:2006-08-11 Issue:2 Volume:85 Page:135-140
ISSN:0947-8396
Container-title:Applied Physics A
language:en
Short-container-title:Appl. Phys. A

Author:

Robinson M.C.,Morris D.J.,Hayenga P.D.,Cho J.H.,Richards C.D.,Richards R.F.,Bahr D.F.

Publisher

Springer Science and Business Media LLC

Subject

General Materials Science,General Chemistry

Link

http://link.springer.com/content/pdf/10.1007/s00339-006-3674-1.pdf

Reference23 articles.

1. R. Ali, D.R. Mahapatra, S. Gopalakakrishnan, Sens. Actuators A 116, 424 (2004)

2. P. Muralt, A. Kholkin, M. Kohli, T. Maeder, Sens. Actuators A 53, 398 (1996)

3. S. Whalen, M. Thompson, D. Bahr, C. Richards, R. Richards, Sens. Actuators A 104, 290 (2003)

4. Y. Arimoto, H. Ishiwara, Mater. Res. Soc. Bull. 29, 823 (2004)

5. H. Yu, L. Zou, K. Deng, R. Wolf, S. Tadigadapa, S. Trolier-McKinstry, Sens. Actuators A 107, 26 (2003)

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