Lead zirconate titanate MEMS accelerometer using interdigitated electrodes-Reference-Cited by-同舟云学术

Lead zirconate titanate MEMS accelerometer using interdigitated electrodes

Published:2003-10 Issue:1 Volume:107 Page:26-35
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Yu Han Geun,Zou L,Deng K,Wolf R,Tadigadapa S,Trolier-McKinstry S

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference17 articles.

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3. An all-silicon single-wafer micro-g accelerometer with a combined surface and bulk micromachining process;Yazdi;J. Microelectromech. Syst.,2000

4. Analysis and experimental evaluation of a new planar piezoelectric accelerometer;Iula;IEEE/ASME Trans. Mechatron.,1999

5. Surface micromachined piezoelectric accelerometers (PiXLs);DeVoe;J. Microelectromech. Syst.,2001

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