Influence of argon pressure and current density on substrate temperature during magnetron sputtering of hot titanium target
Author:
Funder
Russian Science Foundation
Publisher
Springer Science and Business Media LLC
Subject
General Materials Science,General Chemistry
Link
http://link.springer.com/article/10.1007/s00339-017-1458-4/fulltext.html
Reference17 articles.
1. D. Lundin, K. Sarakinos, An introduction to thin film processing using high-power impulse magnetron sputtering. J. Mater. Res. 27, 780–792 (2012). https://doi.org/10.1557/jmr.2012.8
2. V.I. Shapovalov, Nanopowders and films of titanium oxide for photocatalysis: a review. Glass Phys. Chem 36, 121–157 (2010). https://doi.org/10.1134/S108765961002001X
3. V.I. Shapovalov, A.E. Komlev, V.V. Vit’ko et al., Influence of annealing on the optical properties and chemical and phase compositions of tungsten-oxide films. J. Surf. Investig. X ray Synchrotron Neutron Techniq. 10, 1077–1086 (2016). https://doi.org/10.1134/S1027451016040169
4. V.S. Levitskii, V.I. Shapovalov, A.E. Komlev et al., Raman spectroscopy of copper oxide films deposited by reactive magnetron sputtering. Techn. Phys. Lett. 41, 1094–1096 (2015). https://doi.org/10.1134/S106378501511022X
5. J.A. Thornton, Substrate heating in cylindrical magnetron sputtering sources., Thin Solid Films. 54, 23–31 (1978). https://doi.org/10.1016/0040-6090(78)90273-0
Cited by 4 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Study of Heat Flow at Substrate during Sputtering of Copper–Titanium Sandwich Target;Materials;2024-07-21
2. Simulation of the effect of argon pressure on thermal processes in the sputtering unit of a magnetron with a hot target;Vacuum;2021-10
3. Time saving technique for studying thermal processes in magnetron sputtering of titanium target;Journal of Physics: Conference Series;2021-02-01
4. Experimentally unraveling the energy flux originating from a DC magnetron sputtering source;Thin Solid Films;2019-01
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3