Analysis of deep level defects in nitrogen post-deposition annealed Ga2O3/SiC hetero-structured Schottky diodes grown by mist-CVD
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Publisher
Springer Science and Business Media LLC
Link
https://link.springer.com/content/pdf/10.1007/s00339-024-07835-7.pdf
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5. S.H. Cho, Y.J. Shin, S.M. Jeong, S.H. Kwon, S.Y. Bae, Two-step growth of κ-Ga2O3 thin films on 4H-SiC substrates with temperature-varied buffer layers using mist chemical vapor deposition. Jpn. J. Appl. Phys. 62(1), 015508 (2023). https://doi.org/10.35848/1347-4065/acb1e6
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