Finite-element simulation of a phase-field model for inclusion electromigration in {110}-oriented single crystal metal interconnects due to interface diffusion anisotropy
Author:
Publisher
Springer Science and Business Media LLC
Subject
General Materials Science,General Chemistry
Link
https://link.springer.com/content/pdf/10.1007/s00339-022-05754-z.pdf
Reference66 articles.
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3. L. Xia, A.F. Bower, Z. Suo et al., A finite element analysis of the motion and evolution of voids due to strain and electromigration induced surface diffusion. J. Mech. Phys. Solids. 45(9), 1473–1493 (1997)
4. E. Arzt, O. Kraft, W.D. Nix et al., Electromigration failure by shape change of voids in bamboo lines. J. Appl. Phys. 76(3), 1563–1571 (1994)
5. C.M. Tan, A. Roy, Electromigration in ULSI interconnects. Mater. Sci. Eng. R. Rep. 58(1), 1–75 (2007)
Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. A multi-phase-field model of void crossing grain boundary under electromigration-induced anisotropic surface diffusion in interconnects;European Journal of Mechanics - A/Solids;2024-07
2. Correction to: Finite-element simulation of a phase-field model for inclusion electromigration in {110}-oriented single crystal metal interconnects due to interface diffusion anisotropy;Applied Physics A;2022-07-27
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