Downwards to metrology in nanoscale: determination of the AFM tip shape with well-known sharp-edged calibration structures-Reference-Cited by-同舟云学术

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Downwards to metrology in nanoscale: determination of the AFM tip shape with well-known sharp-edged calibration structures

Published:2003-04-01 Issue:6 Volume:76 Page:913-917
ISSN:0947-8396
Container-title:Applied Physics A: Materials Science & Processing
language:
Short-container-title:Applied Physics A: Materials Science & Processing

Author:

H�bner U.,Morgenroth W.,Meyer H.G.,Sulzbach T.,Brendel B.,Mirand� W.

Publisher

Springer Science and Business Media LLC

Subject

General Materials Science,General Chemistry

Link

http://link.springer.com/content/pdf/10.1007/s00339-002-1975-6.pdf

Cited by 48 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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2. Compensation Method for Correcting the Topography Convolution of the 3D AFM Profile Image of a Diffraction Grating;Machines;2024-02-10

3. Determination of the radii of coated and uncoated silicon AFM sharp tips using a height calibration standard grating and a nonlinear regression function;Beilstein Journal of Nanotechnology;2023-12-15

4. Experimental Investigation of Tip Wear of AFM Monocrystalline Silicon Probes;Sensors;2023-04-18

5. Study on Characterization Methods of Tip Radius of AFM Worn Probe;2022 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO);2022-08-08

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