Compensation Method for Correcting the Topography Convolution of the 3D AFM Profile Image of a Diffraction Grating

Abstract

Any 3D AFM image is a convolution of the geometry of the AFM tip and the profile of the scanned sample, especially when the dimensions of the scanned sample are comparable to those of the AFM tip shape. The precise profile of the scanned sample can be extracted from the 3D AFM image if the geometry of the AFM tip is known. Therefore, in order to separate the geometry of the AFM probe tip from the 3D AFM image of a diffraction grating with a rectangular profile and to correct for the topographic convolutions induced by the AFM probe tip, a method is used to quantitatively evaluate the geometry of the AFM probe tip, including the tip radius and the included angle. A model for reconstructing the measured AFM image is proposed to correct topography convolutions caused by the AFM tip shape when scanning a diffraction grating with rectangular profiles. A series of experiments were performed to verify the effectiveness of the proposed AFM tip geometry evaluation method, and comparison experiments were conducted to demonstrate the feasibility and reliability of the proposed reconstruction model.