Optimisation of discharge parameters for the analysis of high purity silicon wafers by magnetic sector glow discharge mass spectrometry
Author:
Publisher
Springer Science and Business Media LLC
Subject
Biochemistry,Analytical Chemistry,Biochemistry
Link
http://link.springer.com/content/pdf/10.1007/BF00633565.pdf
Reference13 articles.
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2. Coburn JW, Kay E (1971) Appl Phys Lett 18:435
3. Harrison WW, Magee CW (1974) Anal Chem 46:461
4. Daugherty EF, Harrison WW (1975) Anal Chem 47:1024
5. Donahue DL, Harrison WW (1975) Anal Chem 47:1528
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