Author:
Toth Z.,Kargl P.,Grivas C.,Piglmayer K.,Sz�renyi T.,B�uerle D.
Publisher
Springer Science and Business Media LLC
Subject
General Engineering,General Physics and Astronomy,Physics and Astronomy (miscellaneous)
Reference6 articles.
1. Springer Ser. Mater. Sci.;D. Bäuerle,1986
2. D.J. Ehrlich, J.Y. Tsao (eds.): Laser Microfabrication ? Thin Film Processes and Lithography (Academic, New York 1989)
3. G.Q. Zhang, T. Szörényi, D. Bäuerle: J. Appl. Phys. 62, 673 (1987)
4. T. Szörényi, K. Piglmayer, G.Q. Zhang, D. Bäuerle: Surf. Sci. 202, 442 (1988)
5. J. Bohandy, B.F. Kim, F.J. Adrian, A.N. Jette: J. Appl. Phys. 63, 1158 (1988)
Cited by
8 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献