Lateral growth rates in laser CVD of tungsten microstructures-Reference-Cited by-同舟云学术

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Lateral growth rates in laser CVD of tungsten microstructures

Published:1988-08 Issue:3 Volume:202 Page:442-456
ISSN:0039-6028
Container-title:Surface Science
language:en
Short-container-title:Surface Science

Author:

Szörényi T.,Piglmayer K.,Zhang G.Q.,Bäuerle D.

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Reference26 articles.

1. Chemical Processing with Lasers;Bäuerle,1986

2. Laser Processing and Diagnostics,1984

3. Laser Processing and Diagnostics II,1986

4. Laser Controlled Chemical Processing of Surfaces,1984

5. Laser Diagnostics and Photochemical Processing for Semiconductor Devices,1983

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1. Growth kinetics and microstructure of carbon deposited on quartz plates and optical fibers by open-air laser-induced chemical vapor deposition;Thin Solid Films;2005-12

2. Numerical modeling of pyrolytic laser-induced chemical vapor deposition;Journal of Applied Physics;2003-03

3. Late-stage kinetics of laser-induced photochemical deposition in liquid solutions;Journal of Applied Physics;2002-11

4. Containerless fabrication of tungsten single crystals using laser CVD for field emission applications;Applied Physics A: Materials Science & Processing;2002-10-01

5. Kinetics, thermodynamics and microstructure of tungsten rods grown by thermal laser CVD;Thin Solid Films;2002-09

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